A Large Stroke Inverse Series Connected Electrothermal Bimorph Micromirror Platform for Optical Applications

Kumar, A and Bansal, D and Kaur, M and Rangra, K (2019) A Large Stroke Inverse Series Connected Electrothermal Bimorph Micromirror Platform for Optical Applications. In: xix International Workshop on The Physics of sem. Devices, December 11-15, 2017, Delhi. (Submitted)

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Abstract

Abstract— This paper presents a large stroke surface micromachined iicro- min‘or platform actuated using inverse-series-connected (ISC) bimorph actua- tor. TI4e platform is capable of’ producing both piston and tip-tilt motion. With a mirror plate size of 500x500 pir 2, the maximum displacement is 100 qm in pis- toimode and 69 qm in tip-tilt mode at 0.2 V. The micromirror is capable of scanning with resonance trequencies at 4.31 KIdz and 6.70 KHz in piston and torsional mode respectively.

Item Type:	Conference or Workshop Item (Paper)
Uncontrolled Keywords:	: Micromirror, MEMS Actuator, Electrothermal Bimorph Actuator
Subjects:	Semiconductor Devices > MEMS and Microsensors
Divisions:	Semiconductor Devices
Depositing User:	Mr. Rabin Chatterjee
Date Deposited:	04 Dec 2019 09:16
Last Modified:	04 Dec 2019 09:16
URI:	http://ceeri.csircentral.net/id/eprint/342

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