Nonlinear Characterization of Microcantilever based Force Sensor using Nanomanipulator System

Sharma, HD and Pal, T (2010) Nonlinear Characterization of Microcantilever based Force Sensor using Nanomanipulator System. In: 36th Annual Conference of IEEE Industrial Electronics (IECON-2010) , November 7-10, 2010, Phoenix, Arizona, USA. (Submitted)

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Abstract

In this paper authors present development of a characterization process for Microcantilever based piezo-resistive force-sensor wherein fusion of real-time vision and force feedback has been used with a nanomanipulator (MM3A R ) system. The system works with MM3A nanomanipulator, it applies definite forces in range of 10-80 �N on the force sensor and resulting deflection produces voltage which is directly measured on oscilloscope. Deflection values have been recorded using images captured by CCD camera mounted on a light microscope. The sensor characterization is carried out which considers third order nonlinear behavior in cantilever based piezo resistive force sensor output. The sensor behavior has been studied using both linear assumption and third order nonlinear system, which shows upto 20% of output is produced by nonlinearity term. Therefore it is significant contribution in the sensor, which cannot be treated negligible. The sensitivity of force sensor found out 18.79mV=�N with linear model whereas with nonlinear model, Linear and Cubic coefficients are 14.75 mV=�N and 0.681 �V=�N3 respectively.

Item Type:	Conference or Workshop Item (Paper)
Uncontrolled Keywords:	Microcantilever; Nonlinear Sensor Characterization; Nanomanipulator;
Subjects:	?? TK ?? Semiconductor Devices > IC Design
Divisions:	Semiconductor Devices
Depositing User:	Mr. Rabin Chatterjee
Date Deposited:	23 May 2013 08:57
Last Modified:	23 May 2013 08:57
URI:	http://ceeri.csircentral.net/id/eprint/72

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