Emulation of MEMS Capacitive Sensor for CMOS Interface Circuit Validation


Downloads per month over past year

Joshi, P and Singhal , N and Santosh, M and Bandyopadhyay, A and Paliwal, S and Mukhiya, R and Bose, SC (2020) Emulation of MEMS Capacitive Sensor for CMOS Interface Circuit Validation. In: 17th IEEE India Council International Conference (INDICON-2020), December 11-13, 2020, NSUT, New Delhi, India.

Download (1592Kb) | Preview


A MEMS capacitive sensor is emulated on a PCB for quick validation of CMOS interface circuit. In capacitive sensor, capacitance changes with external force; to mimic similar changes, controlled magnetic field is applied on emulated PCB capacitor. The dimension optimizations of interdigital capacitor are performed using CST software. The simulated values are milled on a FR4 sheet to make PCB capacitor. The simulated capacitance values are cross checked by making measurement using LCR meter on PCB capacitor and have a deviation of 6.5%. The complete MEMS emulator consists of PCB capacitor, permanent magnet controlled by screw gauge and gauss meter. A minimum change of 50 aF achieved over a base capacitance 1.9 pF.

Item Type: Conference or Workshop Item (Paper)
Uncontrolled Keywords: MEMS sensor, CMOS, Interface circuit.
Subjects: Semiconductor Devices > Sensors and Nanotechnology
Divisions: Semiconductor Devices
Depositing User: Mr. Jitendra Nath Bajpai
Date Deposited: 10 Sep 2021 11:25
Last Modified: 10 Sep 2021 11:25
URI: http://ceeri.csircentral.net/id/eprint/564

Actions (login required)

View Item View Item