Emulation of MEMS Capacitive Sensor for CMOS Interface Circuit Validation

Joshi, P and Singhal , N and Santosh, M and Bandyopadhyay, A and Paliwal, S and Mukhiya, R and Bose, SC (2020) Emulation of MEMS Capacitive Sensor for CMOS Interface Circuit Validation. In: 17th IEEE India Council International Conference (INDICON-2020), December 11-13, 2020, NSUT, New Delhi, India.

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Abstract

A MEMS capacitive sensor is emulated on a PCB for quick validation of CMOS interface circuit. In capacitive sensor, capacitance changes with external force; to mimic similar changes, controlled magnetic field is applied on emulated PCB capacitor. The dimension optimizations of interdigital capacitor are performed using CST software. The simulated values are milled on a FR4 sheet to make PCB capacitor. The simulated capacitance values are cross checked by making measurement using LCR meter on PCB capacitor and have a deviation of 6.5%. The complete MEMS emulator consists of PCB capacitor, permanent magnet controlled by screw gauge and gauss meter. A minimum change of 50 aF achieved over a base capacitance 1.9 pF.

Item Type:	Conference or Workshop Item (Paper)
Uncontrolled Keywords:	MEMS sensor, CMOS, Interface circuit.
Subjects:	Semiconductor Devices > Sensors and Nanotechnology
Divisions:	Semiconductor Devices
Depositing User:	Mr. Jitendra Nath Bajpai
Date Deposited:	10 Sep 2021 11:25
Last Modified:	10 Sep 2021 11:25
URI:	http://ceeri.csircentral.net/id/eprint/564

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