Fabrication and Characterization of Magnetostrictive Micro-cantilevers


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Singh , J and Kumar, R and Sinha, A and Das, S and Arout, CJ and Panwar, DK (2018) Fabrication and Characterization of Magnetostrictive Micro-cantilevers. In: IEEE Sensors 2018 Conference , October 28-31, 2018, New Delhi. (Submitted)

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Abstract- We have developed a magnetostrictive Fe6sC03s thin-film based micro-cantilevers using the micro-fabrication process. The cantilever stack consists of Si/SiO2/Fe6sC03s layers for actuation and thickness was controlled by silicon bulk micromachining process. High magnetostrictive and low-stress Fe/Co 65/35 composition was utilized in cantilevers. Magnetic properties of Fe6sCOJs films were investigated using a vibrating sample magnetometer and laser Doppler vibrometer. Micro­ cantilever dimensions were confirmed using scanning electron microscope. Magnetic actuation was performed by the applied magnetic field of 2000 Oe and tip deflection was monitored using the laser interferometry method. In-house de magnetic field set-up was developed which is compatible to laser Doppler vibrometer. Using a cantilever deflection method magnetostriction coefficient (1.) was found to be 135 ppm. The developed magnetostrictive cantilever is a very useful MagM EMS and low field sensing and actuation applications.

Item Type: Conference or Workshop Item (Paper)
Uncontrolled Keywords: Keywords-cantilever; magnetic; MEMS; magnetostrictive
Subjects: Semiconductor Devices > IC Design
Divisions: Semiconductor Devices
Depositing User: Mr. Rabin Chatterjee
Date Deposited: 27 Jul 2021 11:57
Last Modified: 27 Jul 2021 11:57
URI: http://ceeri.csircentral.net/id/eprint/393

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