Analytical Modeling and Design Optimization of UV-LIGA based 4-DOF Vibratory Gyroscope

Jain, A and Gopal, R (2013) Analytical Modeling and Design Optimization of UV-LIGA based 4-DOF Vibratory Gyroscope. In: International Conference on Emerging Technologies : Micro to Nano 2013 (ETMN-2013), February 23-24, 2013, BITS, Pilani, K.K. Birla Goa Campus, Goa. (Submitted)

Preview

PDF - Submitted Version Download (630Kb) | Preview

Abstract

This paper presents analytical modeling and design optimization of structurally decoupled 4-DOF vibratory gyroscope with increased robustness and gain. The proposed design utilizes dynamic amplification in 2-DOF drive mode oscillator and 2-DOF sense mode oscillator to achieve large gain. Equations of motion are derived for the gyroscope using vector method and the same are verified by lagrangian dynamics. The equations are solved analytically both in frequency domain and time domain to obtain the device’s characteristics. The design is optimized to meet the desired specifications and to be compatible with UV-LIGA fabrication technique having 10

Item Type:	Conference or Workshop Item (Paper)
Uncontrolled Keywords:	MEMS, Gyroscope, Modeling, Optimization, UVLIGA
Subjects:	?? TK ?? Semiconductor Devices > MEMS and Microsensors
Divisions:	Semiconductor Devices
Depositing User:	Mr. Rabin Chatterjee
Date Deposited:	20 May 2013 05:09
Last Modified:	20 May 2013 05:09
URI:	http://ceeri.csircentral.net/id/eprint/63

Actions (login required)

View Item