Design and Simulation of Structurally Decoupled 4-DOF MEMS Vibratory Gyroscope

Jain, A and Gopal, R (2013) Design and Simulation of Structurally Decoupled 4-DOF MEMS Vibratory Gyroscope. In: 26th International Conference on VLSI Design 2013 & 12th International Conference on Embedded Systems (VLSID - 2013), January 5-10, 2013, Pune, India. (Submitted)

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Abstract

This paper presents design of a structurally decoupled 4-DOF MEMS vibratory gyroscope with increased robustness and gain. The proposed design utilizes dynamic amplification in 2-DOF drive mode oscillator and 2-DOF sense mode oscillator to achieve large gain. The device performance is verified through system level simulations in CoventorWare®ARCHITECT3D (SABER) platform, considering 10 μm thick nickel as structural layer. A wide operational bandwidth of 704 Hz is achieved. Moreover to verify the device performance under the application of angular velocity, a rate table simulation is carried out which resulted in sense mass displacement of 136.2 nm corresponding to the rotation induced Coriolis force at actuation voltage of 20 Vac and 40 Vdc with angular rotation of 35 rad/s.

Item Type:	Conference or Workshop Item (Paper)
Uncontrolled Keywords:	4-DOF vibratory gyroscope; simulation; UV-LIGA:
Subjects:	?? TK ?? Semiconductor Devices > MEMS and Microsensors
Divisions:	Semiconductor Devices
Depositing User:	Mr. Rohit Singh
Date Deposited:	21 May 2013 05:03
Last Modified:	21 May 2013 05:03
URI:	http://ceeri.csircentral.net/id/eprint/36

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