Singh, J and Joshi, P and Akhtar, J
(2019)
Piezoelectric ZnO micro-cantilever based mass-sensor.
In: International Symposium on Integrated Functionalities (ISIF), 2017, December 10-13, 2017, New Delhi.
(Submitted)
Abstract
Abstract: We have realized a high sensitivity ZnO micro-cantilevers based MEMS mass sensor. Highly c-axis oriented and room temperature deposited ZnO films are utilized for mass-sensor fabrication. ZnO film have good crystalline quality with full width half maxima (FWHM) 0.26‘, grain size 80 rim and have minimal stress. The resonator layer stack consists of Si/Si 2tPt/ZnO/Pt layers for self-actuation of device. Low cost micromachining process was developed which utilize single side wafer protection holder for silicon bulk micromachining. The wafer holder allows tetra-methyl-ammonium hydroxide (TMAH) bulk micromachining on single side of wafer while protecting devices on other side. The established process is cost effective and can be used alternative method to deep reactive ion etching (DRIE). This inexpensive novel fabrication method provides flexibility to realize variety of piezoelectric based MEMS devices using this technique. Dynamic study of micro-cantilevers was accomplished using laser Doppler vibrometer. The micro-cantilevers were piezoelectrically actuated by applying ac signal across the contact electrodes. The highest mass-sensing performance 0.3138 Hz/pg was obtained corresponding to smallest micro-cantilever size 100 x 50 x8.3 gm . The micro-cantilever has quality factor (Q) of >1093 measured at room temperature and atmospheric pressure.
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