Kumar, SS and Tanwar, A and Santosh, M and Mukhiya, R and Bose, SC
(2019)
Development of Pressure Sensor Module for MAV Application.
In: 3rd National Conference-2017, October 12-13, 2017, Chandigarh.
(Submitted)
Abstract
nf›s/rnc/—Pressure sensors are used in various sectors such as space, aerospace and defense. In this work, a barometric pressure sensor module in the pressure range of 0-1.1 bar is developed for micro air vehicle (MAV) application. Sim ulatio ns are carried out to find the optim u m placement of piezoresistors in the sensor chip. The sensor chip is fabricated with polysilicon piezoresistors and post process wet bulk micromachiningis carried out using TMAH. After fabrication, the sensor characterization is carried out in order to find the non-linearity and the una mplified uncompensated sensitivity output of the sensor. The sensor output is amplified using an instrumentation amplifier and sensor is also interfaced with a microcontroller. AH the functional su b-blocks of ASIC and micro-controller are controlled by an algorith m. I n the sensor module, the sensor, fabricated ASIC and commercial microcontroller are integrated on a single PCB.
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