Role of ZnO Piezoelectric Materials in the Development of MEMS Acoustic Sensor for High Sound Pressure Measurement

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Prasad, M (2017) Role of ZnO Piezoelectric Materials in the Development of MEMS Acoustic Sensor for High Sound Pressure Measurement. In: International Conference on Materials Research and Technology (ICMRT-2017), 10-11 July 2017, Ballabgarh. (Submitted)

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Item Type: Conference or Workshop Item (Lecture)
Subjects: Semiconductor Devices > MEMS and Microsensors
Divisions: Semiconductor Devices
Depositing User: Mr. Rohit Singh
Date Deposited: 11 Sep 2017 11:26
Last Modified: 11 Sep 2017 11:26
URI: http://ceeri.csircentral.net/id/eprint/307

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