Simulation Study of Different Capacitive Micromachined Ultrasonic Transducer (CMUT) Structures

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Kumar, S and Mukhiya, R and Tanwar, S and Sharma, R and Khanna, VK (2016) Simulation Study of Different Capacitive Micromachined Ultrasonic Transducer (CMUT) Structures. In: 3rd International Conference on Young Researchers in Advanced Materials (IUMRS - ICYRAM 2016), 11-15 December 2016, IISC Bangalore. (Submitted)

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Item Type: Conference or Workshop Item (Poster)
Uncontrolled Keywords: MEMS, CMUT, CoventorWare®, Anodic bonding.
Subjects: Semiconductor Devices > MEMS and Microsensors
Divisions: Semiconductor Devices
Depositing User: Mr. Rohit Singh
Date Deposited: 28 Aug 2017 08:58
Last Modified: 28 Aug 2017 08:58
URI: http://ceeri.csircentral.net/id/eprint/288

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