Fabrication of Photonic Crystal Line Defect Waveguides by Use of Optical Lithography and Focused Ion Beam

Dutta, HS and Goyal, AK and Singh, S and Kaur, M and Husale, S and Pal, S (2016) Fabrication of Photonic Crystal Line Defect Waveguides by Use of Optical Lithography and Focused Ion Beam. In: International Conference on Fiber Optics and Photonics (PHOTONICS-2016), 04-08 December 2016, IIT Kanpur. (Submitted)

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Abstract

A fabrication strategy for realizing photonic crystal structures with long interfacing waveguide has been reported. The technique utilizes a combination of optical lithography and focused ion beam milling to fabricate the device.

Item Type:	Conference or Workshop Item (Paper)
Subjects:	Semiconductor Devices > Optoelectronic Devices
Divisions:	Semiconductor Devices
Depositing User:	Mr. Rohit Singh
Date Deposited:	22 Aug 2017 09:37
Last Modified:	22 Aug 2017 09:37
URI:	http://ceeri.csircentral.net/id/eprint/277

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