Fabrication and Characterization of Pressure Sensor, and Enhancement of Output Characteristics by Modification of Operating Pressure Range

Kumar, SS and Pant, BD (2015) Fabrication and Characterization of Pressure Sensor, and Enhancement of Output Characteristics by Modification of Operating Pressure Range. In: 4th International Symposium on VLSI Design & Test (VDAT 2015), June 26-27, 2015, Institute of Technology, Nirma University, Ahmedabad. (Submitted)

Preview

PDF Download (281Kb) | Preview

Abstract

Pressure microsensors are very frequently used for applications encompassing a wide range of operating pressure ranges. However, it is possible to use the same pressure sensor for different operating ranges (in a limited range) with satisfactory performance. In this work, we report the possibility of using a single sensor for different pressure ranges. Operating the sensor at a lower pressure range not only offers flexibility of usage but also enhances output performance in terms of sensitivity and linearity. The concept is demonstrated using a pressure sensor with implanted polysilicon piezoresistors and bulk micromachined diaphragm fabricated using a standard process. The characterization data of the sensor is analyzed for three pressure ranges (10 Bar, 20 Bar and 30 Bar). The results show that modifying the full scale pressure of operation from 30 to 10 Bar increases the sensitivity from 6.03 mV/Bar to 6.58 mV/Bar. The non-linearity is also reduced by an order of magnitude from 3.89 % to 0.33 %.

Item Type:	Conference or Workshop Item (Paper)
Uncontrolled Keywords:	Piezoresistive pressure sensors; Polysilicon piezoresistors; Sensitivity and linearity enhancement
Subjects:	Semiconductor Devices > MEMS and Microsensors
Divisions:	Semiconductor Devices
Depositing User:	Mr. Jitendra Nath Bajpai
Date Deposited:	12 Jan 2017 09:18
Last Modified:	12 Jan 2017 09:18
URI:	http://ceeri.csircentral.net/id/eprint/248

Actions (login required)

View Item