Pal, UN and Gulati, P and Kumar, N and Kumar, M and Srivastava, V and Prakash, R
(2011)
Analysis of Discharge Parameters and Optimization Study of Coaxial DBDs for Efficient Excimer Light Sources.
In: International Conference on Plasma Processing of Organic Materials and Polymers (PPOMP - 2011) , November 25 - 27, 2011, Kerala, India.
(Submitted)
Abstract
In this work, xenon and argon filled coaxial DBD cells have been studied with two different geometries at different operating conditions. An equivalent electrical model representing the DBD phenomenon has been developed which validates the characteristics of the discharge parameters. From the experimental results and equivalent electrical circuit, the dynamic nature of equivalent capacitance has also been reported. The relative intensity analysis of the Xe continuum peak at wavelength 172 nm in the optical emission spectra of VUV region has been carried out for different discharge conditions. Approximately three times increment in radiation is observed in pulse excitation than that of sinusoidal excitation which infers pulsed excitation of DBD sources are advantageous for excimer light sources.
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