Optimization of Sensor Temperature for Sensing Ethanol Gas using Titanium Oxide Films

Mudgal, T and Rani, A and Dwivedi, M and Dadhich, T and Balraj, A and Prakash, V and Sharma, AK and Bhargava, J and Eranna, G (2011) Optimization of Sensor Temperature for Sensing Ethanol Gas using Titanium Oxide Films. In: International Conference on Advanced Material (ICAM - 2011), December 12 - 16, 2011, Coimbatore, India. (Submitted)

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Abstract

For the gas sensing application, semiconducting metal oxide material such as TiO2, ZnO, WO3 and SnO2 etc. play an important, steadily increasing role in almost all fields of electronics, especially their application to gas sensors demand. The principle of operation of semiconductor gas sensors is based on the interaction of a gas molecule with the surface, which produces an interchange or trapping of free carriers. This sensing mechanism implies that the surface of the material is extremely important. Titanium dioxide (TiO2) is used in a wide range of application such as sensor devices, catalysis and dye-sensitized solar cells etc. The material properties of TiO2 are function of the crystal structure, particle size and morphology and strongly dependent on the method of synthesis. TiO2 exits in three main phases: anatase, brookite and rutile .In this paper titanium dioxide as a sensing element is used to detect ethanol (C2H5OH) gas and varying the temperature between 200-500 °C. We can optimized the temperature where sensor response is maximum at around 350 °C for sensing ethanol gas, which is comparatively sense the other gases, by this temperature variation can be achieved using a heater arrangement suspended below titanium oxide. It has wide application in MEMS based gas sensor due to its stability with temperature and high surface volume ratios and electrical response of anatase TiO2 films. In MEMS technology the reduction of power consumption minimizes not only thermal stresses but also enable to use battery operated sensor and smart sensors.

Item Type:	Conference or Workshop Item (Paper)
Subjects:	?? TK ?? Semiconductor Devices > Sensors and Nanotechnology
Divisions:	Semiconductor Devices
Depositing User:	Mr. Rohit Singh
Date Deposited:	22 May 2013 05:07
Last Modified:	22 May 2013 05:07
URI:	http://ceeri.csircentral.net/id/eprint/179

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