MEMS Magnetic Field Sensor Based on Magnetoelectric FeCo/ZnO Thin Films

Singh, J and Kumar, R and Kumar, A and Das, S and Kothari, P and Arout, CJ (2018) MEMS Magnetic Field Sensor Based on Magnetoelectric FeCo/ZnO Thin Films. In: 4th IEEE International Conference on Emerging Electronics (ICEE-2018), December 16-19, 2018, Royal Orchid Resort, Yelahanka, Bengaluru .

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We have developed a microelectromechanical systems (MEMS) based magnetic field sensor utilizing FeCo/ZnO magetoelectric thin films. The micro-cantilever beam stack consists of Si/SiO2/Pt/ZnO/Pt/FeCo multilayers for self-actuation and sensing of devices. The mechanical resonance frequency of sensor was experimentally observed at 10.45 kHz measured using laser Doppler vibrometer (LDV). The sensor and quality factor was obtained ~593. The sensor lateral dimension was 1360µmx180µm and overall layer stack thickness was 7.9 µm. The packaged device dimension measured was 20mmx1Omm. Device sensing performance was measured using a customized magetoelectric measurement set-up and magnetic field sensitivity was 57.6 mV/Gauss in an unshielded environment. The proposed sensor has key advantages such as small size, light weight, low cost, non-invasive and high resolution.

Item Type: Conference or Workshop Item (Paper)
Uncontrolled Keywords: MEMS, Magetoelectric, Magnetic, Sensor
Subjects: Semiconductor Devices > MEMS and Microsensors
Divisions: Semiconductor Devices
Depositing User: Mr. Jitendra Nath Bajpai
Date Deposited: 29 Sep 2021 09:27
Last Modified: 29 Sep 2021 09:27

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