Deposition and Optimization of Piezoelectric ZnO-layer using Sol-gel Technique for MEMS Acoustic Sensor

Raunak, A and Ali, WR and Prasad, M (2021) Deposition and Optimization of Piezoelectric ZnO-layer using Sol-gel Technique for MEMS Acoustic Sensor. In: International Conference on Advances in Materials Science, Communication and Microelectronics (ICAMCM-2021), February 19-20, 2021, JECRC Foundation, Jaipur, Rajasthan.

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Abstract

In this paper, ZnO-layer is deposited and optimized using sol-gel technique for piezoelectricity. The optimized piezoelectric ZnO layer is useful in the development of MEMS Acoustic Sensor and similar applications. In ZnO layer deposition, a solution was prepared using precursor [Zinc Acetate Dihydrate (ZAD)] and binder [Monoethanolamine (MEA)] with different solvents [ethanol and n-propanl]. The deposited samples were annealed at 600° C to obtain the piezoelectricity of the layer. The technological development is supported by characterization of samples using Dektak 6M surface profiler and XRD studies of ZnO film. This paper discusses the effects of solvents and substrate materials with respect to the thickness and crystal structure of deposited piezoelectric ZnO film.

Item Type:	Conference or Workshop Item (Paper)
Uncontrolled Keywords:	Piezoelectricity; Thin film; ZnO; Sol-gel; Spin coating; MEWS; Acoustic sensor;
Subjects:	Semiconductor Devices > MEMS and Microsensors
Divisions:	Semiconductor Devices
Depositing User:	Mr. Jitendra Nath Bajpai
Date Deposited:	14 Sep 2021 07:13
Last Modified:	14 Sep 2021 07:13
URI:	http://ceeri.csircentral.net/id/eprint/573

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