Dual-axis Lorentz Force MEMS Magnetometer


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Aditi, Ms. and Das, S and Kothari, P and Das, S and Gopal, R (2020) Dual-axis Lorentz Force MEMS Magnetometer. In: IEEE Sensors Applications Symposium (SAS-2020), March 9-11, 2020, Kuala Lumpur, Malaysia.

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This paper presents a dual axis MEMS magnetometer, utilizing two DOF torsional gyroscope structure. The designed structure is a torsional resonator with two gimbals. A single structure can detect magnetic field in two directions. The first and second mode of vibrations are the desired mode of operation for detecting the magnetic field in x and y directions. The first and second modes of vibrations are at 107 kHz and 187 kHz respectively. The device is tested for its Lorentz force transduction using MSA-500 in the presence of magnetic field generated using permanent magnet for both the axes at atmospheric pressure. The fabrication process is based on anodic bonding (<400°C) of a borofloat glass wafer and double side polished (DSP) Si wafer, which enables the passivation between Gold loop and Silicon.

Item Type: Conference or Workshop Item (Paper)
Uncontrolled Keywords: Dual-axis, LDV, Lorentz Force, Magnetometer, Torsional
Subjects: Semiconductor Devices > MEMS and Microsensors
Divisions: Semiconductor Devices
Depositing User: Mr. Jitendra Nath Bajpai
Date Deposited: 10 Sep 2021 11:28
Last Modified: 10 Sep 2021 11:28
URI: http://ceeri.csircentral.net/id/eprint/549

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