ZnO/FeCo Thin Film Based Tunable Resonator

Singh, J and Kumar, A (2019) ZnO/FeCo Thin Film Based Tunable Resonator. In: 64th DAE Solid State Physics Symposium(DAE SSPS-2019), December 18-22, 2019, IIT, Jodhpur, India.

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We have developed a highly Tunable Film Bulk Acoustic Wave Resonator (TFBAR) using magnetostrictive Fe65Co35 thin films. The resonator acoustic layer stack consists of ZnO/Fe65Co3s layers for tuning of devices. Due to ΔE effect, TFBAR resonance frequency was up-shifted ~ 106.9MHz (4.91%) in presence of 2kOe magnetic field. From experimental measurement, ΔE enhancement was estimated to be ~ 35 GPa. Further, it is observed that return loss (S11), phase response and quality factor was improved in presence of magnetic field due to high stiffness of magnetic layer. Equivalent Modified Butterworth-Van Dyke (mBVD) circuit model was developed and fitted with experimental data and circuit parameters are extracted. The proposed resonator is compact, low loss, power efficient and highly tunable. This method also facilitates a new way of tuning FBAR devices using magnetostrictive thin films.

Item Type: Conference or Workshop Item (Paper)
Subjects: Semiconductor Devices > Sensors and Nanotechnology
Divisions: Semiconductor Devices
Depositing User: Mr. Jitendra Nath Bajpai
Date Deposited: 27 Aug 2021 07:12
Last Modified: 27 Aug 2021 07:12
URI: http://ceeri.csircentral.net/id/eprint/509

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