FEM-based Study of CMUT Cell for Vacuum-Sealed and Unsealed Cavities


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Gill, GS and Kumar, S and Mukhiya, R and Khanna, VK (2019) FEM-based Study of CMUT Cell for Vacuum-Sealed and Unsealed Cavities. In: 3rd International Conference on Emerging Technologies: Micro to Nano (ETMN-2017), October 6-7, 2017, Solapur. (Submitted)

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Abstract. Capacitive Micromachined Ultrasonic Transducers (CMUT) superseded the piezoelectric transducers for fluid-coupled applications because of their closer impedance to the fluid. Moreover, the new era of silicon micromachining techniques provides us with the possibility to fabricate micro electro-mechanical systems (MEMS)- based electrostatic transducers such as CMUT [1, 2]. In this paper, a comparative study of vacuum-sealed and unsealed Circular Capacitive Micromachined Ultrasonic Transducers (C-CMUT) has been done using CoventorWare tool. The comparison of various analyses such as modal, harmonic, electrostatic, damping and transient analysis has been presented and discussed in this paper. Moreover, the membrane behaviour has been studied for different values of damping ratio (0-1.1). For the computation of these structures, tetrahedron meshing has been selected except for damping analysis, in which split and merge meshing was chosen. For this device, the cavity area of 8170 {im2 is selected. The settling time determined for the membrane is around 3 qs for both Vacuum-Sealed and Unsealed cavities.

Item Type: Conference or Workshop Item (Paper)
Uncontrolled Keywords: Keywords: Resonance Frequency,CMU, FEM, CoventorWare"
Subjects: Semiconductor Devices > MEMS and Microsensors
Divisions: Semiconductor Devices
Depositing User: Mr. Rabin Chatterjee
Date Deposited: 04 Dec 2019 09:11
Last Modified: 04 Dec 2019 09:11
URI: http://ceeri.csircentral.net/id/eprint/326

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