Design, Simulation and Fabrication of MEMS- based Piezoresistive Accelerometer

Upadhyay, AK and Thakur, AD and Kumar, SS and Santosh, M and Shekhar, S and Singhal, N and Mukhiya, R and Bose, SC (2019) Design, Simulation and Fabrication of MEMS- based Piezoresistive Accelerometer. In: 3rd ISSE National Conference-2017, October 12-13, 2017, Chandigarh. (Submitted)

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Abstract

A».sfrac/-This paper presents they design, FEM -based simulations and fabrication of a single degree of freedom MEMS-based piezoresistive accelerometer. Design and FEM-based simulations have been performed using COMSOL° Multiphysics. For the fabrication of the piezoresistive aecelerometer, bulk micromachining techniques have been used. Associated readout circuit performs the operations like sensor offset compensation, amplification and temperature compensation. The interface circuit consists of a high CMRR variable gain amplifier, offset compensation and second amplifier for further amplification. Fabricated accelerometer has been tested using LDV and shaker

Item Type:	Conference or Workshop Item (Paper)
Subjects:	Electronic Systems > Digital Systems
Divisions:	Electronic Systems
Depositing User:	Mr. Rabin Chatterjee
Date Deposited:	04 Dec 2019 09:06
Last Modified:	04 Dec 2019 09:06
URI:	http://ceeri.csircentral.net/id/eprint/319

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