Characterization and Compensation Circuitry for Piezo-Resistive Pressure Sensor to Accommodate Temperature Induced Variation

Santosh, M and Bansal, A and Mishra, J and Behra, KC and Bose, SC (2017) Characterization and Compensation Circuitry for Piezo-Resistive Pressure Sensor to Accommodate Temperature Induced Variation. In: 21st VLSI Design and Test Symposium (VDAT-2017), 29 June 2017 - 02 July 2017, IIT Roorkee. (Submitted)

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Abstract

The paper presents a simple circuit for piezo-resistive pressure sensors which compensates the temperature dependency of sensors. The output of piezo-resistive sensors generally, decreases with the increase in temperature when sub-jected to constant voltage excitation. To control the change with temperature, a varying excitation method is used. The proposed technique utilizes current steer-ing DACs and a digital controller to compensate the variations. The technique is experimentally verified at hardware level where the digital control circuit is im-plemented on FPGA and tested with ASIC’s comprising of interface circuit. For the purpose of compensation, temperature is sensed using the same sensor. The temperature resolved is less than 1ºC for a range of 10ºC to 70ºC with zero pres-sure correction technique. The test results for implementation show that the sen-sitivity and offset shift is compensated by a factor of 10 and 44 respectively. The complete fabricated chip, consisting of interface circuit and algorithm occupies 10mm2 area.

Item Type:	Conference or Workshop Item (Paper)
Uncontrolled Keywords:	Piezo-resistive, Voltage excitation, Current steering DACs, FPGA, Sensitivity, Offset.
Subjects:	Semiconductor Devices > IC Design
Divisions:	Semiconductor Devices
Depositing User:	Mr. Rohit Singh
Date Deposited:	04 Sep 2017 06:35
Last Modified:	04 Sep 2017 06:35
URI:	http://ceeri.csircentral.net/id/eprint/301

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