Design and Simulation of 1.4 GHz Film Bulk Acoustic Resonator for RF Filter Applications


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Patel, R and Bajpai, A and Bansal, D and Boolchandani, D and Rangra, KJ (2017) Design and Simulation of 1.4 GHz Film Bulk Acoustic Resonator for RF Filter Applications. In: 4th International Conference on “Computing for Sustainable Global Development, 01 -03 March, 2017 , New Delhi. (Submitted)

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This research reports the finite element modeling (FEM) simulation of ZnO based film bulk acoustic resonator (FBAR). The design, FEM simulation, and analysis of the FBAR is covered, which is needful for the development of RF filters and duplexers. Different electrical parameters of FBAR such as impedance, phase, quality factor, and total stored electromechanical energy have been simulated with respect to frequency using COMSOL Multiphysics 4.4 software. The back cavity based FBAR structure is used for the confinement of the acoustic energy within the piezoelectric layer. The resonant frequency , anti-resonant , bandwidth, and effective coupling factor of the simulated resonator are 1.4 GHz and 1.441 GHz, 41 MHz, and 7.01%, respectively.

Item Type: Conference or Workshop Item (Paper)
Uncontrolled Keywords: COMSOL Multiphysics; Finite-element method (FEM); Piezoelectric; Effective coupling coefficient; Film Bulk Acoustic Resonator; RF filter.
Subjects: Semiconductor Devices > Sensors and Nanotechnology
Divisions: Semiconductor Devices
Depositing User: Mr. Rohit Singh
Date Deposited: 28 Aug 2017 08:58
Last Modified: 28 Aug 2017 08:58

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