Optimization of MEMS based Gas Sensor Temperature for Sensing CO Gas using TiO2 Film as a Sensing Material


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Mudgal, T and Rani, A and Dwivedi, M and Dadhich, T and Balraj, A and Prakash, V and Sharma, AK and Bhargava, J and Eranna, G (2011) Optimization of MEMS based Gas Sensor Temperature for Sensing CO Gas using TiO2 Film as a Sensing Material. In: 16th International Workshop on the Physics of Semiconductor Devices (IWPSD - 2011), December 19 - 22, 2011, IIT Kanpur, India. (Submitted)

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The miniaturization of gas sensors and the compatibility of their fabrication process with modern microelectronics technology are very important aspects for the development of gas sensing devices. The development of thin film gas sensor based on MEMS structure is a rapidly growing area, enabling fabrication of arrays of sensor elements coupled with reduced power consumption and enhanced sensitivity using microhotplates based on thin membranes (3-5 μm) due to low thermal mass. Thin film metal oxide materials, such as TiO2, are preferred as gas sensing material due to certain advantages it offers. Utilization of these sensors requires higher temperature for their operation. In this paper titanium oxide is being used as a sensing element to detect carbon monoxide (CO) and selecting best operating temperature between 200 °C and 500 °C. It is observed that the sensor response is found to be highest at around 350 °C for sensing CO gas. The gas interact with the titanium oxide thin film and alter the conductivity of the surface. The change in conductivity is proportional to the concentration of gas under test. Suspended platform arrangement is fabricated by MEMS surface micromachining technique. In MEMS technology the reduction of power consumption minimizes not only thermal stresses but also enable to use battery operated sensor and smart sensors.

Item Type: Conference or Workshop Item (Paper)
Uncontrolled Keywords: MEMS, Gas sensor, Micro hotplate, Titanium Oxide, CO gas.
Subjects: Semiconductor Devices > Sensors and Nanotechnology
Divisions: Semiconductor Devices
Depositing User: Mr pvlr reddy
Date Deposited: 27 May 2013 09:21
Last Modified: 12 Jan 2017 09:29
URI: http://ceeri.csircentral.net/id/eprint/201

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