Study of Temperature Optimization of MEMS based ZnOx Thin Film Gas Sensor for Detection of Acetone Vapour


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Dwivedi, M and Dadhich, T and Mudgal, T and Rani, A and Bhargava, J and Sharma, AK and Vyas, V and Eranna, G (2011) Study of Temperature Optimization of MEMS based ZnOx Thin Film Gas Sensor for Detection of Acetone Vapour. In: 16th International Workshop on the Physics of Semiconductor Devices (IWPSD - 2011), December 19 - 22, 2011, IIT Kanpur, India. (Submitted)

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ZnO thin films are being developed in a wide variety of devices because of their unique piezoelectric, optical and electrical properties. Its chemical, electrical and mechanical properties strongly depend on its microstructure. MEMS structures based on thin zinc oxide films are used as the sensitive elements for the application of gas sensors. The key issue in MEMS based ZnO sensor development is the control of the sensing layer properties in order to meet the specific requirements of gas sensing. The development of thin film gas sensor based on MEMS structure is a rapidly growing area, enabling fabrication of arrays of sensor elements coupled with reduced power consumption and enhanced sensitivity using microhotplates based on thin membranes (3-5 μm) due to low thermal mass. This paper presents the study of temperature optimization for MEMS based ZnOx thin film sensor considering the best operating temperature for such sensors. The ZnOx thin film gas sensor are being developed on Si3N4 platform by using the MEMS structure for the detection of volatile organic compounds (VOC) such as acetone. The required temperature which is easy to generate in any battery powered MEMS structures where the total power dissipation is of the order of millwatt. The effect of the operating temperature on the sensing properties of the undoped ZnOx thin films is studied for this purpose. The performance of the sensor is found admirable for acetone (CH3-CO-CH3) at the operating temperature ranging from 150oC to 375oC with a maximum response is at 300°C. The high acetone gas sensitivity and low operating temperature of ZnO thin film gas sensors are attributed to the surface morphology and the surface reaction kinetics.

Item Type: Conference or Workshop Item (Paper)
Uncontrolled Keywords: MEMS, Thin film gas sensor, Zinc oxide (ZnO), Acetone vapour detection
Subjects: Semiconductor Devices > Sensors and Nanotechnology
Divisions: Semiconductor Devices
Depositing User: Mr pvlr reddy
Date Deposited: 27 May 2013 09:13
Last Modified: 28 Aug 2017 08:57

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