Temperature Optimization of MEMS Based ZnOx Thin Film Gas Sensor for Ethanol Vapour Detection

Dwivedi, M and Dadhich, T and Mudgal, T and Rani, A and Sharma, AK and Bhargava, J and Vyas, V and Eranna, G (2011) Temperature Optimization of MEMS Based ZnOx Thin Film Gas Sensor for Ethanol Vapour Detection. In: International Conference on Advanced Material (ICAM - 2011), December 12 - 16, 2011, Coimbatore, India. (Submitted)

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Thin film based gas sensors have great influence in many important areas, namely environment monitoring, domestic safety and automotive applications. Development of thin film gas sensor based on MEMS structure is a rapidly growing area, enabling fabrication of arrays of sensor elements coupled with reduced power consumption and improved sensitivity using microhotplates based on thin membranes (2-3 µm) via low thermal mass. ZnO is popular because of its high surface activity in chemical environment. This paper presents the study of temperature optimization for MEMS based ZnOx thin film sensor considering the best operating temperature. The ZnOx thin film gas sensor is developed on Si3N4 platform by using MEMS structure for the detection of Volatile Organic Compounds (VOC). The effect of operating temperature on sensing properties of undoped ZnOx thin film is studied in the presence of ethanol (C2H5OH) vapour. The enhancement of ethanol sensing properties is promising for application as an alcohol breath analyzer. Sensitivity of the sensor optimized considering the minimum operating temperature as the properties of deposited thin film reduces drastically at higher operating temperature, which again affects the overall performance of sensor. The sensitivity measurement is performed in the temperature range of 100 oC to 500 oC for ethanol. Performance of sensor is found excellent for C2H5OH at the operating temperature ranging from 250 oC to 370 oC. This is a temperature which is easy to create in any battery powered MEMS structures because of millwatt power dissipation to maintain such temperatures.

Item Type: Conference or Workshop Item (Paper)
Uncontrolled Keywords: MEMS, Thin film gas sensor, Zinc oxide (ZnOx), Ethanol Vapor Detection
Subjects: ?? TK ??
Semiconductor Devices > Sensors and Nanotechnology
Divisions: Semiconductor Devices
Depositing User: Mr. Rohit Singh
Date Deposited: 22 May 2013 09:31
Last Modified: 22 May 2013 09:31
URI: http://ceeri.csircentral.net/id/eprint/175

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