Design of Piezoresistive MEMS Absolute Pressure Sensor

Kumar, SS and Pant, BD (2011) Design of Piezoresistive MEMS Absolute Pressure Sensor. In: 16th International Workshop on the Physics of Semiconductor Devices (IWPSD - 2011), December 19 - 22, 2011, IIT Kanpur, India. (Submitted)

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Piezoresistivity involves change of electrical resistance due to an applied stress or strain. Piezoresistive pressure sensors involve using this property of Piezoresistivity to measure the applied pressure. In the present work, the design and optimization of 30 Bar range pressure sensor is carried out using CoventorWare CAD tool. Also the accuracy of Numerical (FEM) solution over the conventional analytical approach for such high pressure ranges is shown.

Item Type: Conference or Workshop Item (Paper)
Uncontrolled Keywords: Piezoresistivity, CoventorWare and Pressure Sensor
Subjects: ?? TK ??
Semiconductor Devices > MEMS and Microsensors
Divisions: Semiconductor Devices
Depositing User: Mr. Rohit Singh
Date Deposited: 21 May 2013 05:14
Last Modified: 24 May 2013 05:47

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