Prasad, M and Yadav, RP and Sahula, V and Khanna, VK (2011) Design and Simulation of Pt-based Microhotplate, and Fabrication of Suspended Dielectric Membrane by Bulk Micromachining. In: 16th International Workshop on the Physics of Semiconductor Devices (IWPSD - 2011), December 19 - 22, 2011, IIT Kanpur, India. (Submitted)
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Abstract
The paper presents the design and simulation of double spiral Pt-based microhotplate (MHP) for gas sensing application. A platinum resistor of 52 has been designed and simulated on a 0.3 micron thick SiO2 suspended membrane of size 40 × 40 μm2 using ANSYS. The SiO2 membrane of size 40 × 40 μm2 and thickness 0.3 micron has been fabricated successfully by bulk micromachining in <100> orientation P-type silicon using 25% tetra methyl ammonium hydroxide (TMAH) solution. The simulated temperature and transit time response of microhotplate were obtained as 600.5 °C and 0.2 ms respectively at 4.8 mW power consumption.
| Item Type: | Conference or Workshop Item (Speech) |
|---|---|
| Uncontrolled Keywords: | MHP, bulk-micromachining and TMAH. |
| Subjects: | ?? TK ?? Semiconductor Devices > MEMS and Microsensors |
| Divisions: | Semiconductor Devices |
| Depositing User: | Mr. Rohit Singh |
| Date Deposited: | 21 May 2013 05:01 |
| Last Modified: | 21 May 2013 05:01 |
| URI: | http://ceeri.csircentral.net/id/eprint/165 |
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