Design, Simulation and Modeling of LTCC based Micro Hotplate for Gas Sensor Applications

Kharbanda, D and Khanna, PK and Shekhar, C and Mohan, A (2012) Design, Simulation and Modeling of LTCC based Micro Hotplate for Gas Sensor Applications. In: International Symposium on Physics and Technology of Sensors (ISPTS) , March 8 - 10, 2012, Pune, India. (Submitted)

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Abstract

Low temperature co-fired ceramics (LTCC)-technology, which is widely used for packaging and manufacturing high frequency RF components, is used for fabrication of micro-hotplates (MHP). Gas sensors produced using this technology leads to low power consumption (500 mW for 226 °C) due to low thermal conductivity (3-4 W/(m-K)). For small series, this technology is remarkably inexpensive compared to the expensive silicon technology. Thermal properties such as temperature distribution and power consumption have been investigated using FEM (Finite Element Method) simulations. Mathematical modeling of these hotplates is also done in accordance with the simulated results.

Item Type:	Conference or Workshop Item (Paper)
Uncontrolled Keywords:	Low temperature co-fired ceramics (LTCC); micro hot-plate (MHP); Finite Element Method (FEM); ANSYS; Gas sensor
Subjects:	?? TK ?? Semiconductor Devices > Hybrid Microcircuits
Divisions:	Semiconductor Devices
Depositing User:	Mr. Rohit Singh
Date Deposited:	22 May 2013 10:08
Last Modified:	22 May 2013 10:08
URI:	http://ceeri.csircentral.net/id/eprint/153

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