Agarwal, A
(2019)
Metal Oxides for Gas Sensing.
In: First Indian Materials Conclave and 30th AGM (MRSI AGM-2019), February 12-15, 2019, Indian Institute of Science, Bangalore, India.
Abstract
A large number of metal, oxides and their derivatives are being developed and demonstrated as sensing materials for various gases and volatile organic compounds. The most popular among these oxides are tin oxides, zinc oxides, tungsten oxides and titanium oxides while many other transition metals oxides are also exploited for gas sensing properties. These sensing materials face many challenges for reliable applications as their properties have cross-sensitivity to environmental conditions like temperature and humidity. The selectivity and sensitivity of metal oxides for an application are the most crucial parameters to be considered. This presentation will discuss various thin film metal oxides like tin oxide, tungsten oxides, copper oxide, etc. that are being used in the realization of MEMS based gas sensors. The process to fabricate such gas sensors, sensing film properties, ways to improve their sensitivity and selectivity will be discussed in details.
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