Fabrication of Electro-Thermally Driven Bimorph Element

Minhas, A and Kumar, A and Bansal, D and Mehta, K and Bajpai, A and Kumar, P and Rangra, K (2019) Fabrication of Electro-Thermally Driven Bimorph Element. In: One Day Workshop on Recent Trends in Transducers and Actuators (RTTA-2019), January 21, 2019, CSIR-CEERI, Pilani, India.

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The aim of this project is to generate a suspended bimorph element for tunable cavity filters and resonators. MEMS tunable element integrated with bulk micro-machined cavity offers small size, large tuning frequency range and low insertion loss which results in improved quality factor. Large vertical displacement, negligible tilting angle and zero lateral shift are the main requirements of the bimorph element. The fabrication of electro-thermally actuated square membrane/plate with gold and silicon dioxide bimorph beams has been done. The bimorph beam is essentially a composite layer of two materials with difference in coefficient of thermal expansion (CTE). A surface micromachining process has been employed in which bimorph structure is suspended by removing underneath sacrificial layer through dry and wet etching.

Item Type: Conference or Workshop Item (Paper)
Uncontrolled Keywords: Bimorph, Tunable cavity filters, Vertical displacement, Coefficient of thermal expansion (CTE), Surface micromachining.
Subjects: Semiconductor Devices > MEMS and Microsensors
Divisions: Semiconductor Devices
Depositing User: Mr. Jitendra Nath Bajpai
Date Deposited: 29 Sep 2021 09:27
Last Modified: 29 Sep 2021 09:27
URI: http://ceeri.csircentral.net/id/eprint/611

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