Design, Simulation and Fabrication of Platinum based Micro-heater for Gas Sensing Application

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Prasad, M and Arora, N and Khanna, VK (2013) Design, Simulation and Fabrication of Platinum based Micro-heater for Gas Sensing Application. In: International Conference on Emerging Technologies : Micro to Nano 2013 (ETMN-2013), February 23-24, 2013, BITS, Pilani, K.K. Birla Goa Campus, Goa. (Submitted)

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Abstract

The paper presents the design, simulation and fabrication of Platinum (Pt) based Microhotplate for gas sensing application. In order to reduce the power consumption, various geometries of microhotplate were simulated using ANSYS. Based on power consumption and average temperature distribution, double spiral pattern of microheater was selected. A Pt resistor of 30 Ω is fabricated on a thin SiO2 membrane. Electrical testing of microhotplate was performed. A temperature of 520 °C was achieved at 19 mW power consumption.

Item Type: Conference or Workshop Item (Paper)
Uncontrolled Keywords: Micro-heater, Gas sensor, ANSYS-Simulation.
Subjects: ?? TK ??
Semiconductor Devices > MEMS and Microsensors
Divisions: Semiconductor Devices
Depositing User: Mr. Rabin Chatterjee
Date Deposited: 23 May 2013 09:10
Last Modified: 23 May 2013 09:10
URI: http://ceeri.csircentral.net/id/eprint/61

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