Investigation of Screening Effect of Bio-molecules on pH Sensitivity of SOI-ISFET Biosensor

Padhye, M and Sinha, S and Mukhiya, R and Sharma, R and Khanna, VK (2019) Investigation of Screening Effect of Bio-molecules on pH Sensitivity of SOI-ISFET Biosensor. In: 3rd International Conference on Emerging Technologies: Micro to Nano (ETMN-2017), October 6-7, 2017, Solapur. (Submitted)

Preview

PDF Download (2827Kb) | Preview

Abstract

Abstract. A behavioral iuacroniodel of the SOI-ISFET has been developed in HSPICE” to simulate the electrol e- oxide-semiconductor structure of the ISFET in a solution with an additional membrane layer. This paper studies the Debye screening of bio-molecules and its effect on the single-gate sensitivity as well as dual-gate sensitivity of the SOI- ISFET based biosensor using the macrornodel developed. The analysis has been done for different sensing materials for the ISFET such as SiO„ Si,N‹ and AI,O,

Item Type:	Conference or Workshop Item (Paper)
Uncontrolled Keywords:	Keywords: SPICE, SOI ISFET, Modeling, Biosensor, Debye Screening
Subjects:	Semiconductor Devices > MEMS and Microsensors
Divisions:	Semiconductor Devices
Depositing User:	Mr. Rabin Chatterjee
Date Deposited:	04 Dec 2019 09:08
Last Modified:	04 Dec 2019 09:08
URI:	http://ceeri.csircentral.net/id/eprint/325

Actions (login required)

View Item