Singh, J and Joshi, P and Singh, R and Sharma, RK and Kothari, P and Singh, AK and Akhtar, J
(2017)
ZnO Thin Film based MEMS Piezoelectric Resonator on Silicon.
In: ISSS International Conference on Smart Materials, Structures and Systems (ISSS 2017), 05-07 July 2017, Bangalore.
(Submitted)
Abstract
Zinc Oxide thin film based piezoelectric resonator has been realized using silicon bulk micromachining technique. Highly c-axis oriented ZnO films have utilized for resonator fabrication. Low cost micromachining process developed which utilize single side wafer protection holder during TMAH etching. This wafer holder allows active devices protection on single side of wafer and TMAH etching on the other side. The used process is cost effective and can be used alternative to deep reactive ion etching process. Dynamic study of resonator studied using laser Doppler vibrometer. Square electrode shape resonator has resonance frequency 1.596 MHz whereas pentagonal has 0.615 MHz. The square and pentagon shaped resonator have shown quality factor was ~95 and ~173 respectively. The resonator was piezoelectrically actuated by applying ac signal across the top and bottom electrodes. Novel low lost fabrication process developed to realize piezoelectric resonators.
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