Mudgal, T and Rani, A and Dwivedi, M and Dadhich, T and Balraj, A and Prakash, V and Sharma, AK and Bhargava, J and Eranna, G
(2011)
Optimization of MEMS based Gas Sensor Temperature for Sensing CO Gas using TiO2 Film as a Sensing Material.
In: 16th International Workshop on the Physics of Semiconductor Devices (IWPSD - 2011), December 19 - 22, 2011, IIT Kanpur, India.
(Submitted)
Abstract
The miniaturization of gas sensors and the
compatibility of their fabrication process with modern
microelectronics technology are very important aspects for the
development of gas sensing devices. The development of thin
film gas sensor based on MEMS structure is a rapidly growing
area, enabling fabrication of arrays of sensor elements coupled
with reduced power consumption and enhanced sensitivity using
microhotplates based on thin membranes (3-5 μm) due to low
thermal mass. Thin film metal oxide materials, such as TiO2,
are preferred as gas sensing material due to certain advantages
it offers. Utilization of these sensors requires higher
temperature for their operation. In this paper titanium oxide is
being used as a sensing element to detect carbon monoxide (CO)
and selecting best operating temperature between 200 °C and
500 °C. It is observed that the sensor response is found to be
highest at around 350 °C for sensing CO gas. The gas interact
with the titanium oxide thin film and alter the conductivity of
the surface. The change in conductivity is proportional to the
concentration of gas under test. Suspended platform
arrangement is fabricated by MEMS surface micromachining
technique. In MEMS technology the reduction of power
consumption minimizes not only thermal stresses but also enable
to use battery operated sensor and smart sensors.
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