Temperature Optimization of MEMS based Tungsten Oxide (WOX) Gas Sensors for H2S Detection


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Rani, A and Mudgal, T and Dadhich, T and Prakash, V and Dwivedi, M and Sharma, AK and Bhargava, J and Eranna, G (2011) Temperature Optimization of MEMS based Tungsten Oxide (WOX) Gas Sensors for H2S Detection. In: International Conference on Advance Material (ICAM - 2011), December 12 - 16, 2011, Coimbatore, India. (Submitted)

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Among metal oxide semiconductor, tungsten oxide (WO3) is an important gas sensing material for the detection of pollutant gaseous species, volatile organic compounds (VOC) and non-hydrocarbon gases such as H2S etc. Most of these gases, at relative low concentrations, are considered very harmful not only to our health but also to the environment in which we live. These trends aims to develop a low-power consumption, reliable, smart, miniaturized sensing devices, and enable to use battery operated sensors, is an important task. Tungsten oxides show appreciable response at high temperatures and creating them on chip is a difficult task. However by using micro machined silicon platforms has decisive advantage to create such localized hot zones to operate this material for better sensitivity. The present paper deals with the thin film based WO3 gas sensing material and its response at operating temperatures to detect H2S gas. In this study we found that the temperature in the range of 100oC to 350oC is a better option to use it as a good sensing material. This higher temperature can be achieved by a micro heater arrangement either on one side of the substrate or an embedded structure within the MEMS suspended platform. In this paper we report the effect of temperature on MEMS based tungsten oxide thin film gas sensor to sense the H2S gas and the best operating temperature of 200 oC for detecting the pollutant gases such as H2S using these WO3 thin films.

Item Type: Conference or Workshop Item (Paper)
Subjects: ?? TK ??
Semiconductor Devices > Sensors and Nanotechnology
Divisions: Semiconductor Devices
Depositing User: Mr. Rohit Singh
Date Deposited: 22 May 2013 09:28
Last Modified: 22 May 2013 09:28
URI: http://ceeri.csircentral.net/id/eprint/178

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